What is a vacuum?
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- FUKUTANI Katsuyuki
- Institute of Industrial Science, University of Tokyo
Bibliographic Information
- Other Title
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- 真空って何？
- 今さら聞けない? 基礎中の基礎 真空って何?
- イマサラ キケナイ キソ チュウ ノ キソ シンクウッテ ナニ
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Abstract
<p>Vacuums are extensively used in a variety of fields ranging from scientific investigations to technological processes ; this range encompasses atomically controlled nano/surface science and technology, semiconductor processing, and the freeze-drying of foodstuffs. In this article, the basic properties and physics of vacuums are reviewed, such as the mean free path of molecules, the frequency of molecular collisions, gas flow, tube conductance, and so forth.</p>
Journal
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- Oyo Buturi
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Oyo Buturi 78 (9), 903-907, 2009-09-10
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390845702289096448
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- NII Article ID
- 10025088758
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- NII Book ID
- AN00026679
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- ISSN
- 21882290
- 03698009
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- NDL BIB ID
- 10339304
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- CiNii Articles
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- Abstract License Flag
- Disallowed