Slurry actions of milli-bubble by lapping of grating groove

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  • ラッピング加工における格子溝定盤上のミリバブルスラリー挙動
  • ラッピング カコウ ニ オケル コウシ コウ ジョウバン ジョウ ノ ミリバブルスラリー キョドウ

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Abstract

<p>In lapping processing, the abrasive grains in the slurry act on the lapping. Therefore, the spreading slurry on the lapping plate is important to improve the lapping efficiency and the waviness. In a previous study, a slurry (milli-bubble slurry) containing bubbles several millimeters in size was supplied, and the slurry was applied extensively to the lapping plate. The results showed that the milli-bubble slurry showed superior lapping properties. This study was performed to examine the actions of the milli-bubble slurry on the grating grooved lapping plate. The results indicated that the grating groove of the upper lapping plate expanded the slurry. The milli-bubble slurry was supplied extensively to the lapping plate by the grating groove and the bubbles in the slurry did not enter the processed part.</p>

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