書誌事項
- タイトル別名
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- Scrub Cleaning with PVA Brushes
- PVA ブラシ ニ ヨル スクラブ センジョウ
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抄録
<p>PVA brushes are widely used for cleaning semiconductor device surfaces. PVA brushes are a soft porous polymer which can be absorb much amount of water. In this review, we briefly introduce the proposed cleaning mechanism. Then some results of frictional analysis of PVA brushes are described. In the frictional analysis, viscoelastic behavior of the brush, surface wettability of a plate, and brush deformation during scrubbing were important. In addition, we introduce a visualization result of real contact area between PVA brush and contact surface.</p>
収録刊行物
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- 混相流
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混相流 32 (2), 223-230, 2018-06-15
日本混相流学会
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詳細情報 詳細情報について
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- CRID
- 1390845712975887232
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- NII論文ID
- 130007402428
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- NII書誌ID
- AN10088286
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- ISSN
- 18815790
- 09142843
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- NDL書誌ID
- 029128458
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可