Review of Leak Test for Vacuum Equipment Maintenance

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Other Title
  • 真空装置のメンテナンス　リークテストの解説
  • シンクウ ソウチ ノ メンテナンス リークテスト ノ カイセツ

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Description

<p>The helium leak test method that is the highest sensitivity among various types of leak tests is reviewed on the application for a vacuum equipment maintenance. The notes and important things on each test condition are explained from the application example.</p>

Journal

  • Vacuum and Surface Science

    Vacuum and Surface Science 61 (8), 505-509, 2018-08-10

    The Japan Society of Vacuum and Surface Science

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