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Vibration Control for Pneumatic Isolation Table with Feedforward Control Input

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Other Title
  • フィードフォワード入力列を用いたon-off弁駆動型空圧式除振台の振動抑制制御
  • フィードフォワード ニュウリョクレツ オ モチイタ on-offベン クドウガタ クウアツシキジョシンダイ ノ シンドウ ヨクセイ セイギョ

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<p>In this paper, we consider a vibration suppression problem for a pneumatic isolation table with on-off valves using the feedforward control input profile. In this system, it is possible to enhance the vibration suppression performance by adjusting the flow rate of air into and from air springs. However, there is a significant problem that a steady state deviation, namely a offset, for displacement of the table occurs. Therefore, we propose an efficient search method of the optimal feedforward control input profile which provides high vibration suppression performance without a steady state deviation. A key idea is to update the control input profile to belong to a space where velocity of the table does not change.</p>


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