Gas Permeability Characterization of a Metal Plate for Photo-imprint Lithography

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  • Sugino Naoto
    Department of Mechanical Systems Engineering, Toyama Prefectural University Technology Development Division, SANKO GOSEI Ltd.
  • Nakajima Shinya
    Department of Mechanical Systems Engineering, Toyama Prefectural University
  • Mizui Kento
    Department of Mechanical Systems Engineering, Toyama Prefectural University
  • Hanabata Makoto
    Department of Mechanical Systems Engineering, Toyama Prefectural University
  • Takei Satoshi
    Department of Mechanical Systems Engineering, Toyama Prefectural University

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説明

During the nanoimprinting process, transfer failure is caused by the presence of air between mold and substrate or the gas generated from the resist material. Therefore, a gas permeable metal plate was prepared, and a plant-derived material containing 50 wt% acetone, was used as the imprinting mold. The gas permeability of the metal plate was evaluated. The results reveal that no gas pool comprising volatilized acetone was found on the surface of the mold material. Thus, the use of gas permeable metal plates can reduce the transfer defects occurring in imprint lithography.

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