1J5-2 High Frequency SAW Resonator Filter composed of ZnO/high-densityelectrode/quartz Structure(Bulk wave devices/Surface wave devices)
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- Kadota Michio
- Murata MFG. Co., Ltd.
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- Nakao Takeshi
- Murata MFG. Co., Ltd.
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- Matsuda Kenji
- Murata MFG. Co., Ltd.
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- Murata Takaki
- Murata MFG. Co., Ltd.
Bibliographic Information
- Other Title
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- 1J5-2 ZnO/高密度電極/水晶構造高周波共振子型フィルタ(バルク波デバイス/弾性表面波デバイス)
Abstract
Radio frequency filters with a narrow band width.and high attenuations are required in recent years. One of the substrates with a suitable coupling factor and an excellent TCF for this filter is a ZnO film/Al electrode/quartz substrate. However, the reflection coefficient of this substrate has not reported, and both the RF SAW filter and the multiple mode resonator one using this substrate have not been reported. In this report, an RF narrow band SAW resonator filter composed of the ZnO/high density metal electrode/quartz structure was realized to obtain a suitable reflection coefficient, and it has minimum insertion loss of 2.08 dB, bandwidths of 3.9MHz (0.054%), and excellent TCF of 4.0ppm/℃.
Journal
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- Proceedings of Symposium on Ultrasonic Electronics
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Proceedings of Symposium on Ultrasonic Electronics 29 (0), 171-172, 2008-11-11
Institute for Ultrasonic Elecronics
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Details 詳細情報について
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- CRID
- 1390845713021124864
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- NII Article ID
- 110007459362
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- ISSN
- 24331910
- 13488236
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed