PF05 Fabrication of SAW functional devices with semiconductor-piezoelectric structure

DOI
  • Kaneshiro C.
    Faculty of Engineering, Kanagawa Institute of Technology
  • Hirai R
    Faculty of Engineering, Kanagawa Institute of Technology
  • Koh K.
    Faculty of Engineering, Kanagawa Institute of Technology
  • Hohkawa K.
    Faculty of Engineering, Kanagawa Institute of Technology

Bibliographic Information

Other Title
  • PF05 Si/圧電体構造を有するSAW機能素子の作製(ポスターセッションI)

Journal

Details 詳細情報について

  • CRID
    1390845713022685568
  • NII Article ID
    110007464034
  • DOI
    10.24492/iuse.21.0_159
  • ISSN
    24331414
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles

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