PF05 Fabrication of SAW functional devices with semiconductor-piezoelectric structure
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- Kaneshiro C.
- Faculty of Engineering, Kanagawa Institute of Technology
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- Hirai R
- Faculty of Engineering, Kanagawa Institute of Technology
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- Koh K.
- Faculty of Engineering, Kanagawa Institute of Technology
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- Hohkawa K.
- Faculty of Engineering, Kanagawa Institute of Technology
Bibliographic Information
- Other Title
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- PF05 Si/圧電体構造を有するSAW機能素子の作製(ポスターセッションI)
Journal
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- Proceedings of Symposium on Ultrasonic Electronics
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Proceedings of Symposium on Ultrasonic Electronics 21 (0), 159-160, 2000-11-06
Institute for Ultrasonic Elecronics
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Details 詳細情報について
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- CRID
- 1390845713022685568
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- NII Article ID
- 110007464034
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- ISSN
- 24331414
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles