小型四重極を用いた残留ガス分析計

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タイトル別名
  • Residual Gas Analyzer Using Miniature Quadrupole Array Mass Spectrometer
  • コガタ シジュウキョク オ モチイタ ザンリュウ ガス ブンセキケイ

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説明

<p>Residual gas analyzers (RGAs) using quadrupole mass spectrometers (QMSs) are essential for many applications and research in vacuum industries, semiconductor process monitoring and water endpoint detection, space exploration, glass coating, environmental screening, petroleum processing and planetary aeronomy studies among others. During the past decades, QMSs have been variously carried out towards miniaturizing mass spectrometer systems, sensor and electronics devices without sacrifice of performance. In this study the design of a miniature quadrupole mass spectrometer having a small total volume of 6 cm3, including electron ionization ion source, quadrupole filter and faraday cup detector is solution to meet the needs. The characterization of a miniature array of 16 rods to obtain nine sets of quadrupole and to increase signals is described.</p><p>We describe design and a comprehensive evaluation of the performance of miniature quadrupole arrays.</p>

収録刊行物

  • 表面と真空

    表面と真空 62 (5), 267-271, 2019-05-10

    公益社団法人 日本表面真空学会

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