Mass Spectrometry Analysis of Outgases from a Vacuum Equipment

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  • 真空装置における放出ガスの質量分析
  • シンクウ ソウチ ニ オケル ホウシュツ ガス ノ シツリョウ ブンセキ

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<p>Industrial vacuum equipment requires a clean surface free from contamination, depending on the intended degree of vacuum from the handling of parts. A quadrupole mass spectrometer is widely used as a method for analyzing outgass in a vacuum vessel. However, in order to perform more quantitative quality control, it is necessary to measure the accurate mass of the gas component and specify the components. In this study, accurate mass measurement was performed on outgass from various vacuum equipment using GC-MS and TOFMS, and it was possible to measure the gas components that could not be measured by the conventional method. By using this equipment, it is expected to improve vacuum quality and product quality.</p>

Journal

  • Vacuum and Surface Science

    Vacuum and Surface Science 62 (5), 251-255, 2019-05-10

    The Japan Society of Vacuum and Surface Science

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