A Device for Localized Measurement of Small Particles with Electrode-Integrated Small Pores

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  • Takeshiro Yudai
    Department of Electrical Engineering and Information Systems, The University of Tokyo
  • Usami Naoto
    Department of Electrical Engineering and Information Systems, The University of Tokyo
  • Okamoto Yuki
    Department of Electrical Engineering and Information Systems, The University of Tokyo
  • Takada Takeaki
    Advantest Corporation
  • Higo Akio
    VLSI Design and Education Center, The University of Tokyo
  • Ikeno Rimon
    VLSI Design and Education Center, The University of Tokyo
  • Washizu Nobuei
    Advantest Corporation
  • Asada Kunihiro
    VLSI Design and Education Center, The University of Tokyo
  • Mita Yoshio
    Department of Electrical Engineering and Information Systems, The University of Tokyo

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Other Title
  • 局所的な微小粒子計測を目指した電極集積型微小孔デバイス
  • キョクショテキ ナ ビショウリュウシ ケイソク オ メザシタ デンキョク シュウセキガタ ビショウコウ デバイス

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<p>In this article, we propose a device with multiple small pores, which are locally integrated with individual electrodes. The application is particle measurement using Coulter's method, using the integrated local electrode on each pore. Coulter's particle counter can achieve high resolution measurement; however, the method had sensitivity and throughput tradeoff problem in reducing measurable particle size. The system can locally observe current around the pore and thereby parallel measurement becomes possible while keeping high sensitivity. The fabricated pore size were 400 nm, 1.0 µm, and 1.5 µm. Spontaneous water flow was achieved with 1.5 µm device, and current dip attributable to Coulter's principle was observed.</p>

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