Electron Optics for Aberration Correction in Electron Microscopy

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  • Okayama Shigeo
    産業技術総合研究所エレクトロニクス研究部門

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  • 収差補正電子光学
  • シュウサ ホセイ デンシ コウガク

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Abstract

<p>Electron optical systems for aberration correction in electron microscopy are outlined starting from Scherzer theorem established in 1936. There are two types of third-order spherical aberration correction-lens systems that used multipoles. One is the so-called hexapole corrector developed by Rose, Haider et al., and the other is the quadrupole−octupole corrector. Self-aligned quadrupole correction-lens is introduced to simplify the construction of the quadrupole−octupole corrector. Axial chromatic aberration can be also corrected by combination of electrostatic and　magnetic quadrupoles, or electrostatic multipole system satisfying optimum relation between the axial potential and the quadrupole strengths.</p>

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  • KENBIKYO

    KENBIKYO 45 (2), 119-124, 2010-06-30

    The Japanese Society of Microscopy

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