Hyperfine 3D Shape Measurement Using Super Resolution Microscope Technology (WLI/SIM)
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- ISHIGE Masashi
- (株)ミツトヨ
Bibliographic Information
- Other Title
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- 超解像顕微鏡技術（WLI／SIM）を用いた微細3D形状測定
- チョウカイゾウ ケンビキョウ ギジュツ(WLI/SIM)オ モチイタ ビサイ 3D ケイジョウ ソクテイ
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Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 86 (7), 520-523, 2020-07-05
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390848250126119680
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- NII Article ID
- 130007869387
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 030561606
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
