Development of Micro-Plasma Excited Deep Ultra Violet (DUV) Light Emitting Device and Medical Application of DUV Light

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  • マイクロプラズマ励起深紫外発光素子の開発と深紫外線の医療応用
  • マイクロプラズマレイキシンシガイ ハッコウ ソシ ノ カイハツ ト シンシガイセン ノ イリョウ オウヨウ

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Deep Ultra Violet Light (hereafter DUV) (200‒350 nm) generated using Hg lamp so far is useful for applications of DUV curing, photo synthesizing of materials, disinfection of virus. However, after the establishment of Minamata trinity on 2013, Hg lamps are basically prohibited. So, the replacement of Hg lamps to other DUV light sources is required. Nowadays, DUV LED are considered to be the replacement of the Hg lamps, but the high price of the LED and the difficulty to emit strong DUV light shorter than 260 nm makes the replacement difficult. In this report, newly developed micro-plasma excited DUV light emitter(hereafter MIPE)is described, which has good properties of Hg free, large area emission, high power and shorter wavelength operation. This device excites luminescent targets efficiently by controlling plasma dynamically. In the experiments, 6 cm × 5 cm large scale MIPE was realized under the wavelength less than 260 nm.

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