Development of <i>Spatiotemporal</i> Measurement and Analysis Techniques in X-ray Photoelectron Spectroscopy ∼From NAP-HARPES to 4D-XPS∼
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- TOYODA Satoshi
- New Industry Creation Hatchery Center, Tohoku University
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- YAMAMOTO Tomoki
- Synchrotron Radiation Nanotechnology Center, University of Hyogo
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- YOSHIMURA Masashi
- SPring-8 Service Co., Ltd.
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- SUMIDA Hirosuke
- Technical Research Center, Mazda Motor Corporation
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- MINEOI Susumu
- Technical Research Center, Mazda Motor Corporation
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- MACHIDA Masatake
- Scienta Omicron, Inc.
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- YOSHIGOE Akitaka
- Japan Atomic Energy Agency
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- SUZUKI Satoru
- Synchrotron Radiation Nanotechnology Center, University of Hyogo
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- YOKOYAMA Kazushi
- Synchrotron Radiation Nanotechnology Center, University of Hyogo
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- OHASHI Yuji
- New Industry Creation Hatchery Center, Tohoku University
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- KUROSAWA Shunsuke
- New Industry Creation Hatchery Center, Tohoku University
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- KAMADA Kei
- New Industry Creation Hatchery Center, Tohoku University
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- SATO Hiroki
- New Industry Creation Hatchery Center, Tohoku University
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- YAMAJI Akihiro
- New Industry Creation Hatchery Center, Tohoku University
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- YOSHINO Masao
- Institute for Materials Research, Tohoku University
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- HANADA Takashi
- Institute for Materials Research, Tohoku University
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- YOKOTA Yuui
- Institute for Materials Research, Tohoku University
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- YOSHIKAWA Akira
- New Industry Creation Hatchery Center, Tohoku University Institute for Materials Research, Tohoku University
Bibliographic Information
- Other Title
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- X線光電子分光における時空間計測/解析技術の開発～NAP-HARPESから4D-XPSへ～
- Xセン コウデンシ ブンコウ ニ オケル ジクウカン ケイソク/カイセキ ギジュツ ノ カイハツ : NAP-HARPES カラ 4D-XPS エ
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Abstract
<p>We have developed spatiotemporal measurement and analysis techniques in x-ray photoelectron spectroscopy. To begin with, time-division depth profiles of gate stacked film interfaces have been achieved by NAP-HARPES (Near Ambient Pressure Hard x-ray Angle-Resolved PhotoEmission Spectroscopy) data. We then have promoted our methods to quickly perform peak fittings and depth profiling from time-division ARPES data, which enables us to realize 4D-XPS analysis. It is found that the traditional maximum entropy method (MEM) combined with Jackknife averaging of sparse modeling in NAP-HARPES data is effective to perform dynamic measurement of depth profiles with high precision.</p>
Journal
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- Vacuum and Surface Science
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Vacuum and Surface Science 64 (2), 86-91, 2021-02-10
The Japan Society of Vacuum and Surface Science
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Details 詳細情報について
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- CRID
- 1390850092195646464
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- NII Article ID
- 130007985448
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- NII Book ID
- AA12808657
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- ISSN
- 24335843
- 24335835
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- NDL BIB ID
- 031304405
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed