Development of <i>Spatiotemporal</i> Measurement and Analysis Techniques in X-ray Photoelectron Spectroscopy ∼From NAP-HARPES to 4D-XPS∼

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  • X線光電子分光における時空間計測/解析技術の開発~NAP-HARPESから4D-XPSへ~
  • Xセン コウデンシ ブンコウ ニ オケル ジクウカン ケイソク/カイセキ ギジュツ ノ カイハツ : NAP-HARPES カラ 4D-XPS エ

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Abstract

<p>We have developed spatiotemporal measurement and analysis techniques in x-ray photoelectron spectroscopy. To begin with, time-division depth profiles of gate stacked film interfaces have been achieved by NAP-HARPES (Near Ambient Pressure Hard x-ray Angle-Resolved PhotoEmission Spectroscopy) data. We then have promoted our methods to quickly perform peak fittings and depth profiling from time-division ARPES data, which enables us to realize 4D-XPS analysis. It is found that the traditional maximum entropy method (MEM) combined with Jackknife averaging of sparse modeling in NAP-HARPES data is effective to perform dynamic measurement of depth profiles with high precision.</p>

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