静電駆動MEMSデバイスを用いた単結晶シリコンへき開面ナノギャップの熱輸送間隔依存性計測

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  • Measurement of gap distance dependence on thermal transfer between nanogap created by single crystal silicon cleavage using MEMS electrostatic actuator

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<p>Thermionic converter with nanogap is attractive as an energy harvesting method, and for realizing it, fabrication methods of high-performance nanogap and measurement of thermal properties between nanogap are required. We have reported fabrication process of nanogap by using cleavage of single crystal silicon beam in MEMS structures. In this report, we measured the gap distance dependence of heat transport across nanogap by resistive heating with controlling gap distance using an electrostatic actuator. The obtained nanogap had initial gap distance of 65 nm and opposing surfaces of 30 μm2. The heat transfer between nanogap changed by narrowing the gap using the actuator. Thermal analysis reveals that the measured gap distance dependence is caused by the effect of near-field radiation.</p>

収録刊行物

  • 年次大会

    年次大会 2020 (0), J22316-, 2020

    一般社団法人 日本機械学会

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