Device fabrication for measuring thermionic emission between vacuum nanogaps created by cleavage fracture of single crystal silicon

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  • 単結晶シリコンのへき開破壊を用いた真空ナノギャップ間の熱電子放出測定用デバイス設計

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<p>In this research, we designed a MEMS device to evaluate the temperature dependence on field electron emission characteristics in large-area nanogaps for practical application of thermionic conversion near room temperature. Large-area nanogaps have attracted attention because they significantly improve the efficiency of thermionic conversion. We adopted a new nanogap fabrication method using cleavage fracture of single crystal silicon, and measured the heat and electron transfer between large-area nanogaps separately. In this research we evaluate the relationship between heat and electron emission in large-area nanogaps consisting of semiconductor electrodes. We have theoretically clarified the thermal field electron emission between semiconductor electrodes and designed a device structure that can simultaneously control gap spacing, electrode heating, and current measurement between gaps after forming a large-area nanogap electrode by cleavage fracture.</p>

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