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The Observation of Local Electric Fields in GaN/AlGaN/InGaN Multi-heterostructures by Differential Phase Contrast STEM
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- Toyama Satoko
- University of Tokyo
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- Seki Takehito
- University of Tokyo
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- Kanitani Yuya
- Sony Group Corporation
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- Tomiya Shigetaka
- Sony Group Corporation
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- Ikuhara Yuichi
- University of Tokyo Japan Fine Ceramics Center
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- Shibata Naoya
- University of Tokyo Japan Fine Ceramics Center
Bibliographic Information
- Other Title
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- 微分位相コントラストSTEMを用いたGaN/AlGaN/InGaNマルチヘテロ接合の局所電場観察
- ビブン イソウ コントラスト STEM オ モチイタ GaN/AlGaN/InGaN マルチヘテロ セツゴウ ノ キョクショ デンバ カンサツ
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Description
<p>The local electric field distributions inside specimens can be directly observed by differential-phase-contrast scanning transmission electron microscopy (DPC STEM). In this study, we applied DPC STEM to GaN/AlGaN/InGaN multi-heterostructures. We successfully visualized the differences in electrostatic potentials of GaN/AlGaN/InGaN.</p>
Journal
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- IEEJ Transactions on Electronics, Information and Systems
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IEEJ Transactions on Electronics, Information and Systems 142 (3), 367-372, 2022-03-01
The Institute of Electrical Engineers of Japan