直流コロナ放電による多孔性圧電膜分極時における雰囲気条件の影響

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タイトル別名
  • チョクリュウ コロナ ホウデン ニ ヨル タコウセイ アツデンマク ブンキョクジ ニ オケル フンイキ ジョウケン ノ エイキョウ

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抄録

To investigate the effects of humidity during corona discharge on the porous piezoelectric films, poling processes of PZT/PZT sol-gel composites using positive and negative corona discharge were operated under different atmospheric and humidity conditions. As a result, differences in atmosphere and humidity were visualized as colors and patterns on the surface of the PZT/PZT films. In the case of positive corona discharge, the surface of the composite turned brown regardless of the atmosphere and humidity, and it was considered because the positive ion was charged on the surface of dielectric porous piezoelectric films when the positive corona discharge was performed, and it resulted in oxide vacancies of PZT. These color differences were quantitatively evaluated by RGB values using an optical microscope and it basically matched with human visual inspection results. In addition, when the humidity was low, speckled patterns were sometimes confirmed regardless of the polarity, and arc discharge was suspected reason. When the samples were poled under high humidity conditions, piezoelectric constants and ultrasonic performances were low regardless the poling polarity.

収録刊行物

  • 静電気学会誌

    静電気学会誌 46 (1), 33-37, 2022

    一般社団法人静電気学会

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