A preliminary study on ferroelectric synaptic device using mist CVD-derived Hf<sub>1-x</sub>Zr<sub>x</sub>O<sub>2</sub> ferroelectric thin film
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- Fujiwara Yuki
- Kyoto Inst. Tech.
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- Tahara Daisuke
- Kyoto Inst. Tech.
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- Nishinaka Hiroyuki
- Kyoto Inst. Tech.
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- Yoshimoto Masahiro
- Kyoto Inst. Tech.
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- Noda Minoru
- Kyoto Inst. Tech.
Bibliographic Information
- Other Title
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- ミストCVD法によるHf<sub>1-x</sub>Zr<sub>x</sub>O<sub>2</sub>薄膜の強誘電体シナプス素子応用に関する基礎的検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.2 (0), 898-898, 2020-08-26
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390854882638462848
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC