Role of Reference Material and Use in Surface Analysis
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- Kurokawa Akira
- National Institute of Advanced Industrial Science and Technology
Bibliographic Information
- Other Title
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- 標準物質の利用と表面分析
Abstract
By measuring a reference material containing a known amount of the substance to be measured, the output of the analytical instrument can be associated with the value of the reference material. This report will outline characteristics that a reference material and a certified reference material should have, terms for expressing the reliability of measurement results, the uncertainty evaluation method, and the certified reference materials for surface analysis. Regarding the surface analysis techniques measuring the film thickness of a nanoscale-thin film layer and uses the film thickness as a measurand, the influence of material properties other than the film thickness will be mentioned. The challenges in developing standard materials for surface analysis will be described.
Journal
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- Journal of Surface Analysis
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Journal of Surface Analysis 28 (1), 2-19, 2021
The Surface Analysis Society of Japan
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Details 詳細情報について
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- CRID
- 1390855035377216384
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- DOI
- 10.1384/jsa.28.2
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- ISSN
- 13478400
- 13411756
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
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- Abstract License Flag
- Disallowed