Growth and ferroelectric properties of epitaxial (Al<sub>1-<i>x</i></sub>Sc<sub><i>x</i></sub>)N films.
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- Yasuoka Shinnosuke
- Tokyo Tech.
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- Shimizu Takao
- NIMS
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- Funakubo Hiroshi
- Tokyo Tech.
Bibliographic Information
- Other Title
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- エピタキシャル(Al<sub>1-<i>x</i></sub>Sc<sub><i>x</i></sub>)N膜の作製と強誘電性評価
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2021.1 (0), 1187-1187, 2021-02-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390855422526502528
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC