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High resolution characterizations of fine structure of semiconductor device and material using scanning nonlinear dielectric microscopy
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- Cho Yasuo
- Tohoku Univ.
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.2 (0), 1605-1605, 2018-09-05
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390856384290778880
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- ISSN
- 24367613
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- Text Lang
- en
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- Data Source
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- JaLC
