Control of electrical conductivity for c-BN films by Si doping
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- Hirama Kazuyuki
- NTT BRL
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- Taniyasu Yoshitaka
- NTT BRL
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- Yamamoto Hideki
- NTT BRL
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- Kumakura Kazuhide
- NTT BRL
Bibliographic Information
- Other Title
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- Siドーピングによるエピタキシャルc-BN薄膜の伝導性制御
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.2 (0), 3358-3358, 2018-09-05
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390856384292236032
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC