Damageless Doping Technology for FinFETs by Spin-Coated PDS
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- Matsukawa Takashi
- AIST
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- Mori Takahiro
- AIST
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- Sawada Yoshihiro
- Tokyo Ohka Kogyo
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- Kinoshita Yohei
- Tokyo Ohka Kogyo
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- Liu Yongxun
- AIST
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- Masahara Meishoku
- AIST
Bibliographic Information
- Other Title
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- PDSスピンコーティングによるFinFET向けダメージレスドーピング技術
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.1 (0), 3141-3141, 2018-03-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390856605462413440
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
