Study for Developing Metallization Method Using Electrically Induced Bubble and Plasma
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- Ichikawa Keita
- Sibaura Inst.
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- Fukuyama Yudai
- Kyushu Univ.
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- Maeda Shingo
- Sibaura Inst.
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- Yamanishi Yoko
- Kyushu Univ.
Bibliographic Information
- Other Title
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- 電界誘起気泡とプラズマを用いたメタライゼーション法の創生
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.1 (0), 3148-3148, 2018-03-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390856605462494592
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC