Evaluation of piezoelectric Ta<sub>2</sub>O<sub>5</sub> thin film by the line-focus-beam ultrasonic material characterization system
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- Suenaga Ryota
- Univ. of Yamanashi
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- Suzuki Masashi
- Univ. of Yamanashi
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- Kakio Shoji
- Univ. of Yamanashi
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- Ohashi Yuji
- Tohoku Univ.
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- Arakawa Mototaka
- Tohoku Univ.
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- Kushibiki Jun-ichi
- Tohoku Univ.
Bibliographic Information
- Other Title
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- 直線集束ビーム超音波材料解析システムによる圧電性Ta<sub>2</sub>O<sub>5</sub>薄膜の評価
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.1 (0), 551-551, 2018-03-05
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390856605463340160
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC