Solid Phase Crystallization and Electrical Properties of CVD-Silicon Films
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- Mizushima Ichiro
- Toshiba Electronic Devices & Storage Corporation
Bibliographic Information
- Other Title
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- ＣＶＤ法により形成したシリコン薄膜の固相結晶化と電気的特性
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.2 (0), 122-122, 2017-08-25
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390856893062085760
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC