Slow Rotation of Microwave Plasma by Amplitude Modulation
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- Hotta Masaya
- Chubu Univ.
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- Ogawa Daisuke
- Chubu Univ.
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- Nakamura Keiji
- Chubu Univ.
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- Park Soonam
- Applied Materials
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- Lubomirsky Dima
- Applied Materials
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- Kobayashi Satoru
- Applied Materials
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- Sugai Hideo
- NISRI
Bibliographic Information
- Other Title
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- 振幅変調によるマイクロ波プラズマの低速回転
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.2 (0), 1673-1673, 2017-08-25
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390856893062438144
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC