MOVPE growth behavior of AlGaN on RIE-GaN surface
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- Yamamoto Akio
- Univ. of Fukui
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- Kanatani Keito
- Univ. of Fukui
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- Makino Shin-ya
- Univ. of Fukui
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- Kuzuhara Masaaki
- Univ. of Fukui
Bibliographic Information
- Other Title
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- RIE-GaN表面でのAlGaNのMOVPE成長挙動
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.2 (0), 3414-3414, 2017-08-25
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390856893063825408
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC