Theoretical analysis of LLSAW propagation properties for layered substrate consisting of ScAlN film/LiNbO<sub>3</sub> plate
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- Suzuki Masashi
- Univ. of Yamanashi
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- Shoji Kakio
- Univ. of Yamanashi
Bibliographic Information
- Other Title
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- ScAlN薄膜/LiNbO<sub>3</sub>基板における縦型リーキーSAW伝搬特性の理論解析
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.2 (0), 349-349, 2017-08-25
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390856893063888512
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC