Computational analyses of chemical reactions in gas phase and on surface in process plasmas
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- Hayashi Toshio
- Nagoya Univ.
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- Ishikawa Kenji
- Nagoya Univ.
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- Sekine Makoto
- Nagoya Univ.
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- Hori Masaru
- Nagoya Univ.
Bibliographic Information
- Other Title
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- 計算化学を用いたプロセスプラズマ中における気相・表面反応解析
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.1 (0), 1847-1847, 2017-03-01
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390857136567379840
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC