Development of piezoelectric vibration energy harvester

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  • 圧電型振動発電デバイスの開発
  • アツデンガタ　シンドウ　ハツデン　デバイス　ノ　カイハツ

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Recently considerable attention has been directed toward the vibration energy harvesters (VEHs) for application of power sources for wireless sensors. We have been developing piezoelectric VEHs, which have features of simple structure, directly convert mechanical energy into electrical energy, and can be integrated into monolithic MEMSscale systems. We prepared the lead-free BiFeO₃ (BFO) piezoelectric films, where LaNiO₃ film was used as the bottom electrode in order to obtain the (100)-oriented BFO films. The BFO films showed the high figure of merit for energy conversion. The typical cantilever-type piezoelectric MEMS VEHs using the BFO films were fabricated by the MEMS technologies, which shows the power generation performance as high as VEHs using Pb(Zr,Ti)O₃ films. This implies that the BFO VEHs are expected as self-supporting power sources. Furthermore, we have been developing the AC magnetic field VEHs as a new application of piezoelectric VEH, which was shown to be promising as a power source for wireless sensors.

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