Ion-irradiation effect on crystal quality of c-BN (001) films
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- Hirama Kazuyuki
- NTT BRL
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- Taniyasu Yoshitaka
- NTT BRL
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- Yamamoto Hideki
- NTT BRL
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- Kumakura Kazuhide
- NTT BRL
Bibliographic Information
- Other Title
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- c-BN(001)薄膜の結晶性に及ぼすイオン照射の影響
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2016.2 (0), 3114-3114, 2016-09-01
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390858131658855424
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC