Piezo-resistive effects of Area-arrayed Dumbbell-Shape Graphene Nano-ribbon Structure for Highly Sensitive Micro-Scale Tactile Sensor

DOI Web Site
  • Disha Mohta
    Department of Mechanical and Aerospace Engineering, School of Engineering, Tohoku University
  • Jowesh Goundar
    Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University
  • Miura Hideo
    Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University
  • Suzuki Ken
    Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University

Bibliographic Information

Other Title
  • 高感度触覚センサ用二次元配列型ダンベル形状グラフェンナノリボンのピエゾ抵抗効果

Abstract

<p>In order to develop a highly-sensitive small-scale tactile sensor, piezoresistive effect of graphene nanoribbon was applied to the sensor. It was confirmed that the graphene nanoribbon narrower than about 70 nm showed semiconductive properties and thus, large piezo-resistive constant. The dumbbell shape was applied to the stable junction between metallic graphene and semiconductive graphene. It was easy to form stable ohmic contact between the metallic graphene and metallic electrode. An area-arrayed nanoscale GNR structure with varying width was fabricated for a highly sensitive tactile sensor. Graphene was synthesized inside a copper pocket using a low-pressure chemical vapour deposition (LP-CVD) method. PMMA- assisted wet transfer process was used to transfer graphene grown on the copper to the target substrate. Then, the electrodes were deposited using electron-beam deposition. A four-point bending test was carried out on the sensor to determine the piezo-resistive effect of the DS-GNR. Finally, the gauge factor was determined under the application of various amounts of strain.</p>

Journal

Keywords

Details 詳細情報について

Report a problem

Back to top