高感度触覚センサ用二次元配列型ダンベル形状グラフェンナノリボンのピエゾ抵抗効果

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  • Mohta Disha
    東北大学工学部 機械知能・航空工学科
  • Goundar Jowesh
    東北大学大学院工学研究科附属先端材料強度科学研究センター
  • 三浦 英生
    東北大学大学院工学研究科附属先端材料強度科学研究センター
  • 鈴木 研
    東北大学大学院工学研究科附属先端材料強度科学研究センター

書誌事項

タイトル別名
  • Piezo-resistive effects of Area-arrayed Dumbbell-Shape Graphene Nano-ribbon Structure for Highly Sensitive Micro-Scale Tactile Sensor

抄録

<p>In order to develop a highly-sensitive small-scale tactile sensor, piezoresistive effect of graphene nanoribbon was applied to the sensor. It was confirmed that the graphene nanoribbon narrower than about 70 nm showed semiconductive properties and thus, large piezo-resistive constant. The dumbbell shape was applied to the stable junction between metallic graphene and semiconductive graphene. It was easy to form stable ohmic contact between the metallic graphene and metallic electrode. An area-arrayed nanoscale GNR structure with varying width was fabricated for a highly sensitive tactile sensor. Graphene was synthesized inside a copper pocket using a low-pressure chemical vapour deposition (LP-CVD) method. PMMA- assisted wet transfer process was used to transfer graphene grown on the copper to the target substrate. Then, the electrodes were deposited using electron-beam deposition. A four-point bending test was carried out on the sensor to determine the piezo-resistive effect of the DS-GNR. Finally, the gauge factor was determined under the application of various amounts of strain.</p>

収録刊行物

  • 年次大会

    年次大会 2022 (0), J221-01-, 2022

    一般社団法人 日本機械学会

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