Measurement of Particle Size Distribution for Poly-Dispersed Particles Using Nanoparticle Chip

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  • ナノ粒子チップを用いた液中の多分散ナノ粒子の高精度粒度分布計測

Abstract

<p>Particle Size Distribution (PSD) analysis for nanoparticle is important for productivity improvement in Chemical Mechanical Polishing (CMP) process. CMP slurry, which consists of nanoparticles in suspension, contains multi-modal PSD due to particle aggregation. In this study, we suggested a novel particle sizing method using nanoparticle chip (NPC). NPC can maintain the aggregation condition of particles to transfer the particles from suspension to the substrate. In this report, a fundamental experiment was performed to investigate the evaluation method of equivalent height diameter using NPC.</p>

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