Irradiation Effects of Acetone Cluster Ion Beam on Photoresist
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- Kakumoto Yuki
- Kyoto Univ.
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- Fujita Akito
- Kyoto Univ.
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- Ryuto Hiromichi
- Kyoto Univ.
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- Takeuchi Mitsuaki
- Kyoto Univ.
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- Takaoka Gikan
- Kyoto Univ.
Bibliographic Information
- Other Title
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- アセトンクラスターイオンビームのフォトレジストに対する照射効果
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2014.1 (0), 1548-1548, 2014-03-03
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390859635832381184
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC