Pre-sputter Technology for GaN Acceptor Doping by Mg-ion Implantation
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- Sun Zheng
- Department of Electrical Engineering and Computer Science, Nagoya Univ.
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- Nagayama Tsutomu
- Nissin Ion Equipment Co., Ltd.
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- Watanabe Tetsuya
- Nissin Electric Co., Ltd.
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- Honda Yoshio
- Department of Electrical Engineering and Computer Science, Nagoya Univ.
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- Amano Hiroshi
- Department of Electrical Engineering and Computer Science, Nagoya Univ. Akasaki Research Center, Nagoya Univ.
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2014.1 (0), 3349-3349, 2014-03-03
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390859635833903744
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- ISSN
- 24367613
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- Text Lang
- en
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- Data Source
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- JaLC