Pre-sputter Technology for GaN Acceptor Doping by Mg-ion Implantation

DOI
  • 孫 政
    Department of Electrical Engineering and Computer Science, Nagoya Univ.
  • 永山 勉
    Nissin Ion Equipment Co., Ltd.
  • 渡邊 哲也
    Nissin Electric Co., Ltd.
  • 本田 善央
    Department of Electrical Engineering and Computer Science, Nagoya Univ.
  • 天野 浩
    Department of Electrical Engineering and Computer Science, Nagoya Univ. Akasaki Research Center, Nagoya Univ.

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