Non-contact sub-nanometer displacement sensing based on optical digital coherent detection using frequency-domain filters

DOI Web Site 参考文献28件
  • Wang Jingwen
    School of Mechanical and Electrical Engineering, Sanming University
  • Hong Jiang
    School of Mechanical and Electrical Engineering, Sanming University
  • Wang Xiaoyan
    School of Mechanical and Electrical Engineering, Sanming University
  • Zheng Lianhui
    School of Mechanical and Electrical Engineering, Sanming University
  • Ren Wen
    School of Mechanical and Electrical Engineering, Sanming University
  • Yan Huixian
    School of Mechanical and Electrical Engineering, Sanming University

抄録

<p>We have introduced a sub-nanometer non-contact displacement sensing method using phase-diversity optical digital coherent detection. The initial work achieved 0.62nm displacement sensing with a 0.21nm resolution using a temporal domain filter. However, optimizing the filter for a sharp transition band and low order posed challenges, limiting noise filtering. To overcome this, frequency-domain filter is proposed and investigated in this work. Employing a frequency-domain bandpass filter improved resolution to 0.07nm at 0.62nm displacement, resulting in an 18.5dB signal-to-noise ratio--8dB higher than temporal domain filtering. This advancement enhances precision for applications in precision instruments without any additional cost.</p>

収録刊行物

  • IEICE Electronics Express

    IEICE Electronics Express 21 (9), 20240089-20240089, 2024-05-10

    一般社団法人 電子情報通信学会

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