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Structural change of hydrogenated DLC film by thermal treatment
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- Mishima Tomohiro
- Lasti,Univ.Hyogo
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- Terai Hibiki
- Lasti,Univ.Hyogo
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- Nakanishi Koji
- Lasti,Univ.Hyogo
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- Niibe Masahito
- Lasti,Univ.Hyogo
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- Kanda Kazuhiro
- Lasti,Univ.Hyogo
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- Fukumuro Naoki
- Eng.,Univ.Hyogo
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- Takeuchi Masaya
- Eng.,Univ.Hyogo
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- Hori Fuminobu
- Eng.,Osaka Pref.Univ.
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- Yabuuchi Atsushi
- KURNS,Kyoto Univ
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- Kinomura Atsushi
- KURNS,Kyoto Univ
Bibliographic Information
- Other Title
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- 熱処理による水素化DLC膜の構造変化
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2022.1 (0), 1161-1161, 2022-02-25
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390866882741045888
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
