スクリーン印刷によるP(VDF-TrFE)膜の作製とフレキシブル超音波センサへの応用

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書誌事項

タイトル別名
  • Fabrication of P(VDF-TrFE) films by Screen Printing and Application to Flexible Ultrasonic Sensor
  • スクリーン インサツ ニ ヨル P(VDF-TrFE)マク ノ サクセイ ト フレキシブル チョウオンパ センサ エ ノ オウヨウ
公開日
2026-02-01
DOI
  • 10.1541/ieejsmas.146.52
公開者
一般社団法人 電気学会

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説明

<p>Polymer ferroelectric P(VDF-TrFE) films were fabricated by screen-printing with patterning, and the effects of annealing conditions, especially vacuum conditions, on the ferroelectric properties were investigated. The highest ferroelectricity was obtained by annealing under atmospheric pressure without vacuuming. Using the P(VDF-TrFE) film, a resonant ultrasonic sensor structure with a membrane was fabricated on a polyimide film, and it was demonstrated that excellent ultrasonic sensor characteristics were obtained at 30 kHz. The developed sensor is expected to be applied as a flexible sensor that enables measurement on curved surfaces such as pipes and the human body.</p>

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