Fixed diamond abrasive polishing method of glass substrate using diamond sheet

DOI Web Site

Bibliographic Information

Other Title
  • ダイヤモンドシートを用いたガラス基板の固定砥粒研磨の研究
  • ダイヤモンドシートを用いたガラス基板の固定砥粒研磨の研究 : クーラント種による研磨レートの評価とその影響分析
  • ダイヤモンドシート オ モチイタ ガラス キバン ノ コテイトリュウ ケンマ ノ ケンキュウ : クーラントシュ ニ ヨル ケンマ レート ノ ヒョウカ ト ソノ エイキョウ ブンセキ
  • –Evaluation of removal rate and influence analysis by type of coolant–
  • —クーラント種による研磨レートの評価とその影響分析—

Search this article

Abstract

<p>With the demand for hard disk drives (HDDs) increasing as long-term storage devices, cost reduction and mass production of glass substrates used for HDDs are required. Currently, fixed abrasive polishing, which uses diamond sheet and coolant, is applied for primary polishing in the production of glass substrates. However, the effects of various coolants on the polishing characteristics have not been clarified. On the other hand, although the effects of the main components of the coolant are mostly unknown, it can be considered that some physical phenomena depending on the removal rate are occurred. This study was performed to determine guidelines required for highly efficient polishing of glass substrates with diamond sheet from the viewpoint of physical properties of coolant and its behavior during polishing. This study focused on the coefficient of friction during polishing, the kinematic viscosity of the coolant, and the physical phenomena of iris pattern as factors affecting the removal rate. Furthermore, multiple regression analysis was performed to identify the performance of coolant and the factors affecting the removal rate. The results confirmed that the kinematic viscosity of the coolant, the friction coefficient, and the iris pattern play important roles in the glass polishing process using diamond sheet.</p>

Journal

Keywords

Details 詳細情報について

Report a problem

Back to top