Direct-Writing Technique Using Femtosecond Laser Reductive Sintering of CuO Nanoparticles

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  • MIZOSHIRI Mizue
    Top Runner Incubation Center for Academia-Industry Fusion, Nagaoka University of Technology
  • HATA Seiichi
    Department of MicroNano Mechanical Science and Engineering, Nagoya University

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Other Title
  • CuOナノ粒子を用いたフェムト秒レーザー還元直接描画法
  • CuO ナノ リュウシ オ モチイタ フェムトビョウ レーザー カンゲン チョクセツ ビョウガホウ

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2D and 3D metal microstructures were directly written using the femtosecond laser reductive sintering of metal oxide nanoparticles. We coated CuO nanoparticle solutions, including CuO nanoparticles, a reductant agent, and a dispersant, on glass substrates. Then the focused femtosecond laser pulses were irradiated onto the solution film to write the microstructures in air. Finally, the non-irradiated CuO nanoparticles were removed. Cu-rich and Cu2O-rich microstructures were selectively fabricated by controlling the laser irradiation conditions. We applied this process to the fabrication of 2D Cu/Cu2O microtemperature sensors and 3D Cu-rich micro flow sensors. We believe this process is useful for fabricating various sensors on arbitral shaped substrates in air.

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