Micro Stereolithography and Molding Techniques for the Production of 3D Microstructures

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  • マイクロ光造形による3D微細構造の造形と転写技術
  • マイクロ ヒカリ ゾウケイ ニ ヨル 3D ビサイ コウゾウ ノ ゾウケイ ト テンシャ ギジュツ

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<p>Micro stereolithography techniques using single-photon and two-photon polymerization have widely been used for making three-dimensional (3D) micro/nano structures applicable in various application fields such as photonics, microfluidics, micromechanical systems, and medicine. In addition, 3D molding techniques using micro stereolithography have also been applied to create large-scale micropatterns useful for functional surfaces such as superhydrophobic surfaces and adhesive surfaces. In this paper, the overview of micro stereolithography and 3D molding techniques is described. The future prospects of these techniques are discussed.</p>

Journal

  • Vacuum and Surface Science

    Vacuum and Surface Science 63 (11), 598-603, 2020-11-10

    The Japan Society of Vacuum and Surface Science

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