Development of an Optical Pressure-sensitive Membrane based on Plasmon Resonance on a Gold Island Film
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- Takebayashi Nagato
- Tokyo University of Agriculture and Technology
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- Ikezawa Satoshi
- Tokyo University of Agriculture and Technology
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- Iwami Kentaro
- Tokyo University of Agriculture and Technology
Bibliographic Information
- Other Title
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- 島状金薄膜におけるプラズモン共鳴を用いた光学的感圧膜の開発
- シマジョウキン ハクマク ニ オケル プラズモン キョウメイ オ モチイタ コウガクテキ カンアツマク ノ カイハツ
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Abstract
<p>In this paper, an optical pressure-sensitive membrane based on plasmon resonance absorption has been designed, fabricated, and demonstrated. The membrane utilizes plasmon resonance on a gold island film embedded in a polydimethylsiloxane (PDMS) layers, and the shift of the resonant wavelength was used as an indicator of pressure-induced strain of the membrane. The membrane with total thickness of 100 µm were prepared with spin-coating of PDMS and vacuum evaporation of gold island film with the nominal thickness of 10 nm. Pressure sensitivity of the fabricated membrane was demonstrated from the measurement of absorbance spectra and the maximum sensitivity of 0.35 nm/kPa was achieved by applying pressure up to 35 kPa. Plasmon resonance mode attributing to the pressure sensitivity has been analyzed through comparison between electromagnetic simulation and membrane stretching test. From the stretching test, red shifts of the resonant wavelength were obtained for both parallel and perpendicular polarizations to the tensile direction with the sensitivities of 0.372 and 0.134 nm/%, respectively. From the electromagnetic simulation, these red shifts can be attributed to both gap-mode and deformation-mode resonances of the gold island film.</p>
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 140 (12), 374-379, 2020-12-01
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1391975276374450560
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- NII Article ID
- 130007948613
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 030793563
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed