Preparation of Nd-Fe-B Thick-film Magnets Deposited on Si Substrates with Each Glass Buffer Layer and their Properties
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- Nakano Masaki
- Graduate School of Engineering, Nagasaki University
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- Momosaki Mizuki
- Graduate School of Engineering, Nagasaki University
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- Matsuoka Ryohei
- Graduate School of Engineering, Nagasaki University
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- Yamashita Akihiro
- Graduate School of Engineering, Nagasaki University
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- Yanai Takeshi
- Graduate School of Engineering, Nagasaki University
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- Fukunaga Hirotoshi
- Graduate School of Engineering, Nagasaki University
Bibliographic Information
- Other Title
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- Glass buffer-layerを有するSi基板上へのNd-Fe-B系厚膜磁石の作製と諸特性
- Glass buffer-layer オ ユウスル Si キバン ジョウ エ ノ Nd-Fe-Bケイ アツマク ジシャク ノ サクセイ ト ショ トクセイ
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Abstract
<p>This contribution reports mechanical characteristic together with magnetic properties of PLD (Pulsed Laser Deposition)-fabricated isotropic Nd-Fe-B thick-films on Si substrates with each glass under layer. An enhancement in the thickness of a PLD-made glass buffer-layer enabled us to reduce the stress between a Si substrate and a film magnet. Moreover, the adoption of a glass buffer-layer was effective to enhance the values of residual magnetic polarization and (BH)max comparing those of a Nd-Fe-B film magnet with almost the same thickness on a Si substrate with a 500-nm thick thermal oxide layer.</p>
Journal
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- IEEJ Transactions on Fundamentals and Materials
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IEEJ Transactions on Fundamentals and Materials 141 (2), 128-132, 2021-02-01
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1391975831241035264
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- NII Article ID
- 130007979623
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- NII Book ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL BIB ID
- 031285139
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed
