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Experimental mechanical stress characterization of micro-electro-mechanical-systems device using confocal laser scanning microscope combined with Raman spectrometer system
Bibliographic Information
- Other Title
-
- Experimental mechanical stress characterization of micro electro mechanical systems device using confocal laser scanning microscope combined with Raman spectrometer system
- Published
- 2007-10
- DOI
-
- 10.1143/jjap.46.6860
- Publisher
- Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
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Description
資料形態 : テキストデータ プレーンテキスト
コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
Journal
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- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
-
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 46 (10A), 6860-6862, 2007-10
Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
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Keywords
Details 詳細情報について
-
- CRID
- 1520009407760863616
-
- NII Article ID
- 40015642893
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- NII Book ID
- AA10457675
-
- ISSN
- 00214922
- 13474065
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- NDL BIB ID
- 8950928
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- Text Lang
- en
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- NDL Source Classification
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- ZM35(科学技術--物理学)
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- Data Source
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- NDL Search
- Crossref
- CiNii Articles
