- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Knowledge Graph Search feature is available on CiNii Labs
- 【Updated on June 30, 2025】Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
Electrical Characteristics of Epitaxial Si Grown on SIMOX Substrates by Ultraclean-CVD Technique
Bibliographic Information
- Other Title
-
- Electrical Characteristics of Epitaxial Si Grown on SIMOX Substrates by Ultraclean CVD Technique
Search this article
Journal
-
- 北海道工業大学研究紀要 = Memoirs of the Hokkaido Institute of Technology / 北海道工業大学 編
-
北海道工業大学研究紀要 = Memoirs of the Hokkaido Institute of Technology / 北海道工業大学 編 (30), 131-136, 2002-03
札幌 : 北海道工業大学
- Tweet
Details 詳細情報について
-
- CRID
- 1520009409229516672
-
- NII Article ID
- 110000340700
-
- NII Book ID
- AN00229541
-
- ISSN
- 03850862
-
- NDL BIB ID
- 6303143
-
- Text Lang
- en
-
- NDL Source Classification
-
- ZM2(科学技術--科学技術一般--大学・研究所・学会紀要)
-
- Data Source
-
- NDL Search
- CiNii Articles