ELFIN(ELevated Field INsulator) and SEP(S/D Elevated by Poly-Si Plugging) Process for Ultra-Thin SOI MOSFETs

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  • ELFIN ELevated Field INsulator and SEP S D Elevated by Poly Si Plugging Process for Ultra Thin SOI MOSFETs
  • AWAD2002(Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)
  • AWAD2002 Asia Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices

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