ELFIN(ELevated Field INsulator) and SEP(S/D Elevated by Poly-Si Plugging) Process for Ultra-Thin SOI MOSFETs

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ELFIN ELevated Field INsulator and SEP S D Elevated by Poly Si Plugging Process for Ultra Thin SOI MOSFETs
AWAD2002(Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)
AWAD2002 Asia Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices

電子情報通信学会技術研究報告 = IEICE technical report : 信学技報

電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 102 (178), 9-12, 2002-07-01

東京 : 電子情報通信学会