Invited Fabrication of Sub-100nm Linewidth Grating Patterns Using Nanoimprint Lithography

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  • Invited Fabrication of Sub 100nm Linewidth Grating Patterns Using Nanoimprint Lithography
  • 2004 Asia-Pacific Workshop on Fundamentals and Application of Advanced Semiconductor Devices(AWAD 2004) ; Session A8 Nano-Lithography
  • 2004 Asia Pacific Workshop on Fundamentals and Application of Advanced Semiconductor Devices AWAD 2004 ; Session A8 Nano Lithography

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